On-Site Gas GenerationMeeting your volume needs with low-cost, reliable on-site solutions for nitrogen, hydrogen and fluorine generation and ammonia purification

Regardless of your volume and purity needs, we have a wide selection of on-site gas generators supporting the full range of process needs within the global electronics industry.

You can rely on Linde's experts to deliver low-cost, reliable solutions for:

• Nitrogen generation 

• Hydrogen generation 

• Fluorine generation 

• Ammonia purification.

Gas	Output Range	Purity
Nitrogen	6,000 - 36,000 Nm3 per hour	1 ppb
Hydrogen	50 - 1,000 Nm3 per hour	99.999%
Fluorine	80 - 1600 liters per hour	99.9%
Ammonia	1,000 - 5,000 liters per minute	99.99999%

Low Running Costs

Our on-site gas generators are optimized to keep your total cost of ownership as low as possible. Here we look at all cost factors including capital outlay, power consumption and running costs.

 
Reliability

In addition, our on-site gas generators give you the benefit of uninterrupted operations. They are designed for continuous delivery, seven days a week, 24 hours a day.