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  • On-Site Gas Generation

On-Site Gas Generation Meeting your volume needs with low-cost, reliable on-site solutions for nitrogen, hydrogen, and fluorine generation and ammonia purification

Regardless of your volume and purity needs, we have a wide selection of on-site gas generators supporting the full range of process needs within the global electronics industry.


You can rely on Linde's experts to deliver low-cost, reliable solutions for:

  • Nitrogen generation 

  • Hydrogen generation 

  • Fluorine generation 

  • Ammonia purification

Gas Output Range Purity
Nitrogen 6,000 - 50,000 Nm3 per hour <1 ppb
Hydrogen 50 - 1,000 Nm3 per hour 99.999%
Fluorine 80 - 3,200 liters per hour 99.9%
Ammonia 1,000 - 5,000 liters per minute 99.99999%


Low Running Costs

Our on-site gas generators are optimized to keep your total cost of ownership as low as possible. Here we look at all cost factors including capital outlay, power consumption, and running costs.

 
Reliability

In addition, our on-site gas generators give you the benefit of uninterrupted operations. They are designed for continuous delivery, seven days a week, 24 hours a day.

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Market segments
  • Semiconductor
  • Display
  • Solar
  • LED
Collateral
Download Ammonia Datasheet(PDF 802.0 KB) ECOVAR Brochure(PDF 2.0 MB) EUV Lithography Adds to Increasing Hydrogen Demand at Leading-Edge Fabs -Solid State Technology article(PDF 2.0 MB) Download Fluorine Datasheet(PDF 656.0 KB) HYDROPRIME On-Site Hydrogen Generators datasheet(PDF 2.0 MB) On-site fluorine for sustainable manufacturing brochure(PDF 831.0 KB) On-Site Fluorine - Silicon Semiconductor two articles(PDF 8.0 MB)
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